Simplified description of microwave plasma discharge for...

Simplified description of microwave plasma discharge for chemical vapor deposition of diamond

Yamada, Hideaki, Chayahara, Akiyoshi, Mokuno, Yoshiaki
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Volume:
101
Year:
2007
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2711811
File:
PDF, 430 KB
english, 2007
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