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Tribological Study of Brush Scrubbing in Post-Chemical Mechanical Planarization Cleaning in Non-porous Ultralow-k Dielectric∕Cu Interconnects
Gu, Xun, Nemoto, Takenao, Teramoto, Akinobu, Sakuragi, Misa, Sugawa, Shigetoshi, Ohmi, TadahiroVolume:
158
Year:
2011
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/2.046111jes
File:
PDF, 422 KB
english, 2011