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Frequency dependence on the structure of radio frequency glow discharges in Ar
Kakuta, Shigeru, Makabe, Toshiaki, Tochikubo, FumiyoshiVolume:
74
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.354324
File:
PDF, 1.14 MB
english, 1993