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[IEEE 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Clearwater, FL, USA (2009.08.17-2009.08.20)] 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Reliability-based characterization of single crystalline silicon micromirrors for space applications
Yoo, Byung-Wook, Park, Jae-Hyoung, Jin, Joo-Young, Park, I. H., Kim, Yong-KweonYear:
2009
Language:
english
DOI:
10.1109/omems.2009.5338593
File:
PDF, 584 KB
english, 2009