Sub-Micron-Wide Surficial Trench Frames to Define the Coating Areas of Sensitive Layers on Silicon MEMS Resonant Chemical Sensors
Murakami, Sunao, Ikehara, Tsuyoshi, Konno, Mitsuo, Maeda, Ryutaro, Fukawa, Tadashi, Kimura, Mutsumi, Mihara, TakashiVolume:
96
Language:
english
Journal:
Electronics and Communications in Japan
DOI:
10.1002/ecj.11379
Date:
October, 2013
File:
PDF, 1.08 MB
english, 2013