Effect of capacitive coupling in a miniature inductively...

Effect of capacitive coupling in a miniature inductively coupled plasma source

Takao, Yoshinori, Eriguchi, Koji, Ono, Kouichi
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Volume:
112
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4764333
File:
PDF, 2.08 MB
english, 2012
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