Oxidation of silicon nitride prepared by plasma-enhanced chemical vapor deposition at low temperature
Liao, Wen-Shiang, Lin, Chi-Huei, Lee, Si-ChenVolume:
65
Year:
1994
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.112772
File:
PDF, 346 KB
english, 1994