Effects of argon addition on a-CN[sub x] film deposition by...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2002 Vol. 20; Iss. 4

Effects of argon addition on a-CN[sub x] film deposition by hot carbon filament chemical vapor deposition

Watanabe, Yoshihisa, Aono, Masami, Yamazaki, Ayumi, Kitazawa, Nobuaki, Nakamura, Yoshikazu
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Volume:
20
Year:
2002
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1481757
File:
PDF, 538 KB
english, 2002
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