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[Japan Soc. Appl. Phys Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (6-8 Nov. 2002)] 2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. - Fabrication of 3-dimensional structure MOSFET embodied in the convex corner of the silicon microfluidic channel
Geunbae Lim,, Chin-Sung Park,, Hong-Kun Lyu,, Dong-Sun Kim,, Yong-Taek Jeong,, Hey-Jung Park,, Hyoung Sik Kim,, Jang-Kyoo Shin,, Pyung Choi,, Jong-Hyun Lee,Year:
2002
Language:
english
DOI:
10.1109/imnc.2002.1178679
File:
PDF, 168 KB
english, 2002