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Light-anodization process for high-J/sub c/ micron and submicron superconducting junction and integrated circuit fabrication
Xiaofan Meng,, Van Duzer, T.Volume:
13
Language:
english
Journal:
IEEE Transactions on Appiled Superconductivity
DOI:
10.1109/tasc.2003.813652
Date:
June, 2003
File:
PDF, 686 KB
english, 2003