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Development of x-ray laminography under an x-ray microscopic condition
Hoshino, Masato, Uesugi, Kentaro, Takeuchi, Akihisa, Suzuki, Yoshio, Yagi, NaotoVolume:
82
Year:
2011
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3609865
File:
PDF, 756 KB
english, 2011