Microstructure and tribological performance of...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2010 Vol. 28; Iss. 5

Microstructure and tribological performance of nanocomposite Ti–Si–C–N coatings deposited using hexamethyldisilazane precursor

Wei, Ronghua, Rincon, Christopher, Langa, Edward, Yang, Qi
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Volume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3463709
File:
PDF, 805 KB
english, 2010
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