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An analytical kinetic model for chemical-vapor deposition of pureB layers from diborane
Mohammadi, V., de Boer, W. B., Nanver, L. K.Volume:
112
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4767328
File:
PDF, 1.61 MB
english, 2012