Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 2
Formation of 10-μm-level patterned organic thin film using microthermal evaporation
Choi, Jun Hee, Zoulkarneev, Andrei, Noh, Tae Yong, Lee, Young Gu, Kim, Sun Il, Park, Sung Soo, Baik, Chan Wook, Choi, Byoung Lyong, Kim, Miyoung, Yi, Gyu-Chul, Kim, Jong MinVolume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3554400
File:
PDF, 890 KB
english, 2011