Formation of amorphous silicide nanoclusters in chromium-...

Applied Physics Letters 1995 Vol. 67; Iss. 19

Formation of amorphous silicide nanoclusters in chromium- and titanium-implanted silica

Cattaruzza, E., Mattei, G., Mazzoldi, P., Bertoncello, R., Battaglin, G., Mirenghi, L.
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Volume:
67
Year:
1995
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.114817
File:
PDF, 480 KB
english, 1995
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