Improved Au Schottky contacts on GaAs using cryogenic metal...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2006 Vol. 24; Iss. 4

Improved Au Schottky contacts on GaAs using cryogenic metal deposition

Wang, Hung-Ta, Jang, S., Anderson, T., Chen, J. J., Kang, B. S., Ren, F., Herrero, A., Gerger, A. M., Gila, B. P., Pearton, S. J., Shen, H., LaRoche, Jeffrey R., Smith, Kurt V.
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Volume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.2213270
File:
PDF, 522 KB
english, 2006
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