Atomic layer chemical vapor deposition of ZrO[sub 2]-based...

Journal of Applied Physics 2003 Vol. 93; Iss. 7

Atomic layer chemical vapor deposition of ZrO[sub 2]-based dielectric films: Nanostructure and nanochemistry

Dey, S. K., Wang, C.-G., Tang, D., Kim, M. J., Carpenter, R. W., Werkhoven, C., Shero, E.
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Volume:
93
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1555257
File:
PDF, 689 KB
english, 2003
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