![](/img/cover-not-exists.png)
Etch characteristics of optical waveguides using inductively coupled plasmas with multidipole magnets
An, K. J., Lee, D. H., Yoo, J. B., Lee, J., Yeom, G. Y.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581840
File:
PDF, 474 KB
english, 1999