Etch characteristics of optical waveguides using...

Etch characteristics of optical waveguides using inductively coupled plasmas with multidipole magnets

An, K. J., Lee, D. H., Yoo, J. B., Lee, J., Yeom, G. Y.
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581840
File:
PDF, 474 KB
english, 1999
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