Amorphous fluorocarbon polymer (a-C:F) films obtained by...

Amorphous fluorocarbon polymer (a-C:F) films obtained by plasma enhanced chemical vapor deposition from perfluoro-octane (C[sub 8]F[sub 18]) vapor. II. Dielectric and insulating properties

Biloiu, Costel, Biloiu, Ioana Arabela, Sakai, Yosuke, Sugawara, Hirotake, Ohta, Akitsugu
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1759354
File:
PDF, 465 KB
english, 2004
Conversion to is in progress
Conversion to is failed