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Amorphous fluorocarbon polymer (a-C:F) films obtained by plasma enhanced chemical vapor deposition from perfluoro-octane (C[sub 8]F[sub 18]) vapor. II. Dielectric and insulating properties
Biloiu, Costel, Biloiu, Ioana Arabela, Sakai, Yosuke, Sugawara, Hirotake, Ohta, AkitsuguVolume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1759354
File:
PDF, 465 KB
english, 2004