Polysilicon sealed vacuum cavities for...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1999 Vol. 17; Iss. 4

Polysilicon sealed vacuum cavities for microelectromechanical systems

Zook, J. David, Herb, William R., Ahn, Yongchul, Guckel, Henry
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581762
File:
PDF, 1.18 MB
english, 1999
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