Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2010 Vol. 28; Iss. 3
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Resurrecting dirty atomic force microscopy calibration standards
Chernoff, Donald A., Sherman, RobertVolume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3388847
File:
PDF, 820 KB
english, 2010