Surface and sub-surface thermal oxidation of thin ruthenium...

Surface and sub-surface thermal oxidation of thin ruthenium films

Coloma Ribera, R., van de Kruijs, R. W. E., Kokke, S., Zoethout, E., Yakshin, A. E., Bijkerk, F.

How much do you like this book?

What’s the quality of the file?

Download the book for quality assessment

What’s the quality of the downloaded files?

Volume:

105

Language:

english

Journal:

Applied Physics Letters

DOI:

10.1063/1.4896993

Date:

September, 2014

File:

PDF, 1.25 MB

english, 2014

Conversion to is in progress

Conversion to is failed