Ionization by Drift and Ambipolar Electric Fields in...

Physical Review Letters 2011 / 12 Vol. 107; Iss. 27

Ionization by Drift and Ambipolar Electric Fields in Electronegative Capacitive Radio Frequency Plasmas

Schulze, J., Derzsi, A., Dittmann, K., Hemke, T., Meichsner, J., Donkó, Z.
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Volume:
107
Language:
english
Journal:
Physical Review Letters
DOI:
10.1103/PhysRevLett.107.275001
Date:
December, 2011
File:
PDF, 804 KB
english, 2011
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