Design and performance of cryogenic wafer prober

Review of Scientific Instruments 1986 Vol. 57; Iss. 1

Design and performance of cryogenic wafer prober

Kotani, Seigo, Fujimaki, Norio, Hasuo, Shinya
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Volume:
57
Year:
1986
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1139131
File:
PDF, 601 KB
english, 1986
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