[IEEE 2012 IEEE International Ultrasonics Symposium - Dresden, Germany (2012.10.7-2012.10.10)] 2012 IEEE International Ultrasonics Symposium - Lock-in driven quality factor enhancement with parasitic effect compensation of a self-actuated piezoelectric MEMS cantilever
Kucera, M., Manzaneque, T., Sanchez-Rojas, J.L., Bittner, A., Schmid, U.Year:
2012
Language:
english
DOI:
10.1109/ultsym.2012.0548
File:
PDF, 1.88 MB
english, 2012