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Electrical and chemical characterization of a-C:H prepared by rf glow discharge
Varhue, W. J., Pandelisev, K. A., Shinseki, B. S.Volume:
67
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.345031
File:
PDF, 886 KB
english, 1990