Graphene functionalization and seeding for dielectric...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2012 Vol. 30; Iss. 3

Graphene functionalization and seeding for dielectric deposition and device integration

Garces, Nelson Y., Wheeler, Virginia D., Gaskill, D. Kurt
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3693416
File:
PDF, 6.51 MB
english, 2012
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