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[IEEE 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Xian, China (2012.10.29-2012.11.1)] 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology - Inter-CMOS process for monolithic integrated MEMS resonator
Zhao, Danqi, Yang, Fang, Lin, Chen, Zhang, DachengYear:
2012
Language:
english
DOI:
10.1109/icsict.2012.6467753
File:
PDF, 430 KB
english, 2012