Room-temperature silicidation using radiation-enhanced...

Applied Physics Letters 2000 Vol. 76; Iss. 6

Room-temperature silicidation using radiation-enhanced diffusion in hydrogenated amorphous silicon

Shannon, J. M., Chai, M. K., Sealy, B. J.
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Volume:
76
Year:
2000
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.125871
File:
PDF, 306 KB
english, 2000
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