Focused Electron Beam-Induced CVD of Iron: a Practical Guide for Direct Writing
Gavagnin, Marco, Wanzenboeck, Heinz D., Shawrav, Mostafa M., Belic, Domagoj, Wachter, Stefan, Waid, Simon, Stoeger-Pollach, Michael, Bertagnolli, EmmerichVolume:
20
Language:
english
Journal:
Chemical Vapor Deposition
DOI:
10.1002/cvde.201407118
Date:
September, 2014
File:
PDF, 746 KB
english, 2014