Optical function evolution of ion-assisted ZrN films deposited by sputtering
Valerini, D., Signore, M. A., Rizzo, A., Tapfer, L.Volume:
108
Year:
2010
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3493267
File:
PDF, 1.16 MB
english, 2010