Metal-induced dopant (boron and phosphorus) activation...

Journal of Applied Physics 2009 Vol. 106; Iss. 7

Metal-induced dopant (boron and phosphorus) activation process in amorphous germanium for monolithic three-dimensional integration

Park, Jin-Hong, Tada, Munehiro, Jung, Woo-Shik, Wong, H.-S. Philip, Saraswat, Krishna C.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
106
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3238297
File:
PDF, 918 KB
english, 2009
Conversion to is in progress
Conversion to is failed