[IEEE International Electron Devices Meeting 1999....

[IEEE International Electron Devices Meeting 1999. Technical Digest - Washington, DC, USA (5-8 Dec. 1999)] International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318) - 50 nm gate-length CMOS transistor with super-halo: design, process, and reliability

Bin Yu,, Haihong Wang,, Milic, O., Qi Xiang,, Weizhong Wang,, An, J.X., Ming-Ren Lin,

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Year:

1999

Language:

english

DOI:

10.1109/iedm.1999.824237

File:

PDF, 343 KB

english, 1999

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