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[IEEE 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Hualien, Taiwan (2007.08.12-2007.07.16)] 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Combined Device of Optical Microdisplacement Sensor and PZT-Actuated Micromirror
Akase, K., Sawada, R., Higurashi, E., Kobayashi, T., Maeda, R., Inokuchi, M., Sanada, S., Ishikawa, I.Year:
2007
Language:
english
DOI:
10.1109/omems.2007.4373909
File:
PDF, 1.04 MB
english, 2007