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[IEEE 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference - Stresa, Italy (2007.06.11-2007.06.12)] 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - The Application and Use of an Automated Spatial Pattern Recognition (SPR) System in the Identification and Solving of Yield Issues in Semiconductor Manufacturing
Drozda-Freeman, Andrew, McIntyre, Mike, Retersdorf, Mike, Wooten, Christopher, Song, Xin, Hesse, AdamYear:
2007
Language:
english
DOI:
10.1109/asmc.2007.375121
File:
PDF, 534 KB
english, 2007