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[IEEE International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM) - Smolenice, Slovakia (16-18 Oct. 2000)] ASDAM 2000. Conference Proceedings. Third International EuroConference on Advanced Semiconductor Devices and Microsystems (Cat. No.00EX386) - Structural and electrical properties of SiO/sub 2/ thin films produced by the different methods
Perez-Bueno, J.J., Ramirez-Bon, R., Espinoza-Beltran, F., Vorobiev, Yu.V., Gonzalez-Hernandez, J.Year:
2000
Language:
english
DOI:
10.1109/asdam.2000.889444
File:
PDF, 285 KB
english, 2000