Abnormal threshold voltage shift under hot carrier stress...

Abnormal threshold voltage shift under hot carrier stress in Ti1−xNx/HfO2 p-channel metal-oxide-semiconductor field-effect transistors

Tsai, Jyun-Yu, Chang, Ting-Chang, Lo, Wen-Hung, Ho, Szu-Han, Chen, Ching-En, Chen, Hua-Mao, Tseng, Tseung-Yuen, Tai, Ya-Hsiang, Cheng, Osbert, Huang, Cheng-Tung
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Volume:
114
Year:
2013
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4822158
File:
PDF, 1.43 MB
english, 2013
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