Observations and simple fracture mechanics analysis of indentation fracture delamination of TiN films on silicon
Weppelmann, E.R., Hu, X.-Z., Swain, M.V.Volume:
8
Language:
english
Journal:
Journal of Adhesion Science and Technology
DOI:
10.1163/156856194X00375
Date:
January, 1994
File:
PDF, 6.02 MB
english, 1994