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The constitution of nitrided oxides and reoxidized nitrided oxides on silicon
M. L. Naiman, C. T. Kirk, B. L. Emerson, J. B. Taitel, S. D. SenturiaYear:
1985
Language:
english
DOI:
10.1063/1.336196
File:
PDF, 1.31 MB
english, 1985