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[Japan Soc. Promotion of Sci International Vacuum Microelectronics Conference - Osaka, Japan (7-11 July 2003)] IEEE/CPMT/SEMI. 28th International Electronics Manufacturing Technology Symposium (Cat. No.03CH37479) - Energy spread measurement of electrons from field emitter array for ion beam neutralization
Ishikawa, J., Gotoh, Y., Nakamura, K., Tsuji, H., Matsuda, K., Nagai, N., Sakai, S., Ikejiri, T., Umisedo, S., Hamamoto, N.Year:
2003
Language:
english
DOI:
10.1109/ivmc.2003.1223101
File:
PDF, 127 KB
english, 2003