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Defect detection in nano-scale transistors based on radio-frequency reflectometry
B. J. Villis, A. O. Orlov, X. Jehl, G. L. Snider, P. Fay, M. SanquerYear:
2011
Language:
english
DOI:
10.1063/1.3647555
File:
PDF, 1.60 MB
english, 2011