Oxygen-deficient centers and excess Si in buried oxide using photoluminescence spectroscopy
Nishikawa, Hiroyuki, Stahlbush, Robert E., Stathis, James H.Volume:
60
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.60.15910
Date:
December, 1999
File:
PDF, 139 KB
english, 1999