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[IEEE 2008 IEEE 35th International Conference on Plasma Science (ICOPS) - Karlsruhe, Germany (2008.06.15-2008.06.19)] 2008 IEEE 35th International Conference on Plasma Science - Dielectric barrier discharge species gain for microelectronic substrate treatment
Arshak, Khalil, Guiney, Ivor, Korostynska, Olga, Forde, EdwardYear:
2008
Language:
english
DOI:
10.1109/plasma.2008.4590975
File:
PDF, 33 KB
english, 2008