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[IEEE 2009 IEEE International SOI Conference - Foster City, CA, USA (2009.10.5-2009.10.8)] 2009 IEEE International SOI Conference - Thermal actuation of high frequency micromechanical resonators
Rahafrooz, Amir, Hajjam, Arash, Pourkamali, SiavashYear:
2009
Language:
english
DOI:
10.1109/soi.2009.5318786
File:
PDF, 689 KB
english, 2009