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Effects of matching network on the hysteresis during E and H mode transitions in argon inductively coupled plasma
Gao, Fei, Zhao, Shu-Xia, Li, Xiao-Song, Wang, You-NianVolume:
17
Year:
2010
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.3496385
File:
PDF, 457 KB
english, 2010