In situ investigation of the growth of rf glow-discharge...

  • Main
  • In situ investigation of the growth of...

In situ investigation of the growth of rf glow-discharge deposited amorphous germanium and silicon films

A. M. Antoine, B. Drevillon, P. Roca I Cabarrocas
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
1987
Language:
english
DOI:
10.1063/1.337924
File:
PDF, 1.19 MB
english, 1987
Conversion to is in progress
Conversion to is failed