[IEEE 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS) - Sorrento, Italy (2009.01.25-2009.01.29)] 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems - MEMS-Based Batch-Mode Micro-Electro-Discharge Machining using Microelectrode Arrays Actuated by Hydrodynamic Force

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