Towards simultaneous achievement of carrier activation and...

Applied Physics Letters 2014 / 09 Vol. 105; Iss. 12

Towards simultaneous achievement of carrier activation and crystallinity in Ge and GeSn with heated phosphorus ion implantation: An optical study

D'Costa, Vijay Richard, Wang, Lanxiang, Wang, Wei, Lim, Sin Leng, Chan, Taw Kuei, Chua, Lye Hing, Henry, Todd, Zou, Wei, Hatem, Christopher, Osipowicz, Thomas, Tok, Eng Soon, Yeo, Yee-Chia
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Volume:
105
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4896507
Date:
September, 2014
File:
PDF, 1.18 MB
english, 2014
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