[IEEE 1993 Symposium on Semiconductor Modeling and Simulation [Technical Digest] - Taipei, Taiwan (March 6-7, 1993)] 1993 Symposium on Semiconductor Modeling and Simulation [Technical Digest] - Recessed Metal/Silicon Contact Resistance Measured by the Cross-Bridge-Kelvin Resistor Structure - Numerical Analysis
Bing-Yue Tsui,, Mao-Chieh Chen,Year:
1993
Language:
english
DOI:
10.1109/sms.1993.664574
File:
PDF, 156 KB
english, 1993