[IEEE 2014 10th European Workshop on Microelectronics...

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[IEEE 2014 10th European Workshop on Microelectronics Education (EWME) - Tallinn, Estonia (2014.5.14-2014.5.16)] 10th European Workshop on Microelectronics Education (EWME) - “MEMS de Piano”- an experimental course of design, fabrication, and testing of MEMS oscillator

Mita, Yoshio, Kubota, Masanori, Denoual, Matthieu, Lebrasseur, Eric, Sawamura, Tomoki
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Year:
2014
Language:
english
DOI:
10.1109/ewme.2014.6877420
File:
PDF, 1.62 MB
english, 2014
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